| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-12044 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-296
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-29
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-04 |
| filingDate |
1986-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2809bb80086ef398da6a77d93ecd4a56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ff7fcae5d0894ed29a947d4cc551db9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_406e6b0e807fc208a5804a831c08bb4d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2308a4a10e275f2ca0801d5d2c5dcf45
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e43a490ac6d075e3994e338a5c72d936
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c0e3af0717a532d16465a38741c8ada |
| publicationDate |
1987-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-S62230828-A |
| titleOfInvention |
Insulating film for semiconductor, formation thereof and coating solution |
| abstract |
PURPOSE:An insulating film, obtained by coating a base material with a mixture solution of a siloxane based prepolymer prepared by polycondensing respective tetrafunctional, trifunctional and bifunctional siloxanes in an organic solvent and heat-treating the resultant coat in the presence of oxygen at a specific temperature or above and useful for semiconductors. CONSTITUTION:An insulating film obtained by coating a base material with a mixture solution consisting of a siloxane based prepolymer prepared by simultaneously polycondensing (A) a tetraalkoxysilane expressed by formula I (R<1> is 1-6C alkyl or 6-10C aryl), (B) an alkyltrialkoxysilane or aryltrialkoxysilane expressed by formula II (R<2> and R<3> are same as R<1>) and (C) a dialkyldialkoxysilane or diaryldialkoxysilane expressed by formula III (R<4>-R<6> are same as R<1>) at 0.14-0.5:0.03-0.66:0.11-0.66mol ratio (A):(B):(C) or preferably previously polycondensing the component (B) and polymerizing the components (A) and (C) and an organic solvent and heat-treating the resultant coat in the presence of oxygen at >=400 deg.C. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011181898-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013047293-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5998522-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6183942-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5840821-A |
| priorityDate |
1985-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |