| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c186e9ae8cafab5df5c8d80cfa7b0fa1 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B21-064
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-511 |
| filingDate |
1986-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_05d7a2c355f719fc898fd999ad1d4a06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d96b2c5818a59a63580b67b32172768 |
| publicationDate |
1987-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-S62207869-A |
| titleOfInvention |
Parts coated with hard boron nitride containing oxygen |
| abstract |
PURPOSE: To improve the hardness of a coating film of hard boron nitride by incorporating oxygen into the film during deposition on the surface of a base materizal from a vapor phase so as to increase the amount of cubic or wurtzite type crystals. n CONSTITUTION: A gaseous mixture cong. B 2 H 6 , NH 3 , H 2 and N 2 O is introduced into a reactor. Microwaves are applied to the reactor to generate plasma and a base material is placed in the plasma to form a coating film contg. oxygen by 0.01W30atom% of the total amount of nitrogen and oxygen. Thus, parts coated with hard boron nitride contg. oxygen and having a cubic or wurtzite type crystal structure are obtd. n COPYRIGHT: (C)1987,JPO&Japio |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006024386-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007124890-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008511751-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8110296-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007169743-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1784524-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7914903-B2 |
| priorityDate |
1986-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |