http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S62108848-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d93502a23a72b56472bc75854cfe7c60 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C215-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C213-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C67-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C213-00 |
| filingDate | 1985-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5c894732cb1048e498c35451bddf469 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_12343a4894d4b497e974042e20d3e4e0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5451ee470eb0592f8d73c20dd1e1f917 |
| publicationDate | 1987-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S62108848-A |
| titleOfInvention | Production of 2-hydroxyethyltrialkylammonium hydroxide aqueous solution |
| abstract | PURPOSE: A trialkylamine aqueous solution of a specific concentration is allowed to react with ethylene oxide in vapor at a specific molar ratio under vigorous stirring of the aqueous solution in a specific temperature range to obtain the titled aqueous solution of high purity, being used as a resist developer. n CONSTITUTION: A trialkylamine of formula I (R is 1W8C alkyl) is dissolved in water into a 10W50% aqueous solution. Ethylene oxide of formula II is gradually fed at a molar ratio of less than 0.95 ethylene oxide to 1 trialkylamine in vapor phase to effect the reaction between them under vigorous agitation so that the reaction temperature is kept lower than 60°C to give an aqueous solution of 2-hydroxyethyltrialkylammonium hydroxide of formula III. Usually, ethylene oxide first reacts with trialkylamine, if it is present, but, if the amount of water is largely excessive or the concentration of ethylene oxide is locally high, side-reactions occur to cause discoloration. But, under the conditions according to the present invention, by-products are reduced to give the objective aqueous solution of high concentration. n COPYRIGHT: (C)1987,JPO&Japio |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9527799-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015503543-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9216944-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013098575-A1 |
| priorityDate | 1985-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.