http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S6180243-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 1984-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e2d51952d4090354a0cea56848c08af3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_decdd7b9a53244a3f56f269bca4ea40b |
| publicationDate | 1986-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S6180243-A |
| titleOfInvention | Negative type organosiloxane resist |
| abstract | PURPOSE:To obtain the titled resist having a good sensitivity against a high energy radiation such as a X ray and an electron ray etc. and to make useful for a semiconductive element and an electron ray circuit. CONSTITUTION:The tiled resist contains a siloxane resin shown by the formula [wherein the siloxane in the polymer unit has the following formula i.e. (a+b+c)=1.95-2.05, (a)/(a+b+c)=0.4-0.9, (b)/(a+b+c)=0-0.1, (c)/(a+b+c)=0.1-0.6), a mean mol.wt. 150,000-1,000,000, a mol.wt. distribution is <=2.5 specific disper sion Mw/Mn]. The siloxane resin is prepared by reacting [(CH3)3SiO]4, [(CH2= CH)CH3SiO]4, [(C6H5)2SiO]4 and [(CH33SiO]4 in a prescribed ratio. As the above described resin is used to the titled resist, said resin has the high sensitiv ity and a high resolving accuracy against the high energy ray and is usable to the circuit. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4553693-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006143882-A |
| priorityDate | 1984-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S5849717-A |
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458433298 |
Total number of triples: 21.