http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S61269061-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b19eaa8e535da4e4bceed99917a68153 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N9-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-00 |
| filingDate | 1985-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e47641ec2a692a67c73d0deb4ff7da1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c9a469680eb397a99fb76ef2821258da http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b32172fee5b06dae168b55bfca24da5 |
| publicationDate | 1986-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S61269061-A |
| titleOfInvention | Apparatus for measuring concentration of gas |
| abstract | PURPOSE: To attain to enhance humidity resistance, by constituting the ultrasonic sensor used in a gas concn. measuring apparatus from an ultrasonic vibrator, a holder and a seal substance and providing a conductive or non-conductive membrane to the surface of the seal substance. n CONSTITUTION: An ultrasonic sensor 43 is formed by such a method that the electrode of an ultrasonic vibrator 45 is connected to terminals 48, 49, which were fixed to a substrate 50, through cables 46, 47 to be received in a holder 44 and sealed by a seal substance 51 while a membrane 52 comprising a non- conductive substance such as SiO or SiO 2 or a conductive substance such as Al is formed to the surface of said seal substance 51 by vacuum vapor deposition or sputtering. A transmitting element 2 and a receiving element 3 are arranged in a gaseous atmosphere 4 to be measured in opposed relationship and the concn. of the gas is measured on the basis of the difference between the frequency of a feedback oscillation system 13 and that of a quartz vibrator 14. Therefore, the humidity of the sensor 43 can be enhanced to a large extent and the concn. of gas can be measured over a long period of time with high accuracy. n COPYRIGHT: (C)1986,JPO&Japio |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012521251-A |
| priorityDate | 1985-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.