http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S61256647-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5547f741b25666fc4ae5195cf71a979b |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2223-5448 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2223-54473 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 1985-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c100d2ec801a6d19dfd00b9b13b9df5c |
| publicationDate | 1986-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S61256647-A |
| titleOfInvention | Inspection of semiconductor device |
| abstract | PURPOSE:To reduce man-hours for inspection and eliminate mistakes by a method wherein a plurality of gate arrays which have different logic functions are formed on a semiconductor wafer and the inspection patterns corresponding to the respective gate arrays are read out in accordance with the marks representing code numbers determined correspondingly to the respective logic functions. CONSTITUTION:A plurality of gate arrays 2 and 3, which have respective logic functions different from each other, are formed in net arrangement on a semiconductor wafer 1. A code number identification mark 4, which consists of a combination of long segments 5a and 5c and short segments 5b and 5d made of a light-reflecting material, for instance aluminum, is provided in each gate array. On the other hand, a light 7 from a light source 6 is applied to the mark 4 and the reflected light 7' is detected by a light detection part 8. The length of the segment is measured as the magnitude of the detected light and the combination of the lengths of the segments of the mark 4 is identified by an identifying part 9. If a long segment is identified as '1' and a short segment is identified as '0', the code number represented by the mark 4 can be identified in terms of binary number '1010'. After an inspection pattern corresponding to this '1010' is transmitted from a memory part 10 to an inspection part 11, the inspection is carried out. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0265220-A |
| priorityDate | 1985-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419491804 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5359268 |
Total number of triples: 18.