http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S61167943-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6cfc033f059d282fcd915bc8be2ae53f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0388 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
| filingDate | 1985-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0b08cd06f83f5db66c478faf62d62d9b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_001ce290120043e3d8c84c539d748738 |
| publicationDate | 1986-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S61167943-A |
| titleOfInvention | Alpha-methylstyrene resin composition for photoresist |
| abstract | PURPOSE:To obtain a resin composition for a photoresist having satisfactory functions such as high sensitivity and resolving power by combining an alpha- methylstyrene copolymer having specified segments with a triplet sensitizer. CONSTITUTION:A poly-alpha-methylstyrene resin composition for the photoresist is composed of an alpha-methylstyrene copolymer having segments represented by the formula (where each of m and n is an integer) and a triplet sensitizer. The ratio of diisopropenylbenzene residues in the alpha-methylstyrene copolymer to all the monomeric units in the copolymer is about 0.005-0.50. When the ratio of alpha-methylstyrene and diisopropenylbenzene residues in the copolymer is >=0.5, the copolymer may contain other monomeric units. The rays of light having >=330nm wavelength are irradiated on the film of the resin composition. The composition is made insoluble in a solvent by a cross-linking reaction caused by the irradiation, and the insoluble composition is decomposed and volatilized at a relatively low temp., so the composition is suitable for use as a photoresist. |
| priorityDate | 1985-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 16.