http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S61127732-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5db580deca7130dbe51805c6c608b35 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-00 |
filingDate | 1984-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb2c0b6a8b818916cb055419ec3967d5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_46e5be69c077042c4b65054ae951e1a2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dd26d9884f9cb36b6af161adb5a456cb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_249134be689cbc0d3642d044031f18d4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d6fee1507469f39f701994f78da6e12 |
publicationDate | 1986-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-S61127732-A |
titleOfInvention | Molecular weight fractionation of ladder-type silicone resin |
abstract | PURPOSE: To carry out the titled fractionation in high reproducibility, by dissolving a silylated silsesquioxane polymer in a solvent having the maximum average molecular weight to be fractionated as the limit of soluble molecular weight, and precipitating the polymer from the solution by the addition of a solvent having the minimum average molecular weight to be fractionated as the limit of soluble molecular weight. n CONSTITUTION: For example, a component having a molecular weight of 1W5×10 4 is fractionated from a silylated silsesquioxane polymer (e.g. polymethyl silsesquioxane), by dissolving the component having a weight-average molecular weight (Mw) of ≤5×10 4 in a solvent having the maximum average molecular weight to be fractionated as the limit of soluble molecular weight (e.g. isopropanol), removing the insoluble component, adding a solvent having the minimum average molecular weight to be fractionated as the limit of soluble molecular weight (e.g. methanol) to effect the precipitation of the component having Mw of >1×10 4 , and recovering the precipitate. n EFFECT: The obtained resin has excellent sharpness and sensitivity when used as an electron beam resist. n COPYRIGHT: (C)1986,JPO&Japio |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5247043-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5486564-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5416190-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5063267-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5779299-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0493879-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0599209-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0599209-A3 |
priorityDate | 1984-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.