http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S61127732-A

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filingDate 1984-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb2c0b6a8b818916cb055419ec3967d5
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publicationDate 1986-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-S61127732-A
titleOfInvention Molecular weight fractionation of ladder-type silicone resin
abstract PURPOSE: To carry out the titled fractionation in high reproducibility, by dissolving a silylated silsesquioxane polymer in a solvent having the maximum average molecular weight to be fractionated as the limit of soluble molecular weight, and precipitating the polymer from the solution by the addition of a solvent having the minimum average molecular weight to be fractionated as the limit of soluble molecular weight. n CONSTITUTION: For example, a component having a molecular weight of 1W5×10 4 is fractionated from a silylated silsesquioxane polymer (e.g. polymethyl silsesquioxane), by dissolving the component having a weight-average molecular weight (Mw) of ≤5×10 4 in a solvent having the maximum average molecular weight to be fractionated as the limit of soluble molecular weight (e.g. isopropanol), removing the insoluble component, adding a solvent having the minimum average molecular weight to be fractionated as the limit of soluble molecular weight (e.g. methanol) to effect the precipitation of the component having Mw of >1×10 4 , and recovering the precipitate. n EFFECT: The obtained resin has excellent sharpness and sensitivity when used as an electron beam resist. n COPYRIGHT: (C)1986,JPO&Japio
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0493879-A2
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priorityDate 1984-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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Total number of triples: 28.