| abstract |
PURPOSE:To attain 100% chloromethylation rate by hydrolyzing chloromethylphenyltrichlorosilane. CONSTITUTION:Chloromethylated phenyltrichlorosilane represented by formula I in which n is a positive integer is synthesized by hydrolyzing chloromethylphenyltrichlorosilane and polymerizing it through dehydration. A resist high in sensitivity can be obtained by substituting groups sensitive to high-energy rays, such as -CH2OCO-CH=CHC6H5, -CH2OCO-CH=CH2, -CH2Br, or the like for a part of -CH2Cl groups or all of them to an amt. of high-energy groups introduced. |