http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S6055630-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38520f366e74704305b34fb93a81121e |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 1983-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_04f8330435c3de57393a5bb3a817e904 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2207f9cf4d60935339c52f1ce1c5bee8 |
| publicationDate | 1985-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S6055630-A |
| titleOfInvention | Method for forming resist pattern |
| abstract | PURPOSE:To facilitate pattern formation through lifting-off, by a method in which a film of quinone diazoester formed as a resist film on the substrate surface is radiated with far ultraviolet rays, and thereafter developed with acetic ester or cyclohexanone developing solution added with water and alcohol. CONSTITUTION:A film of oligomer quinone diazoester formed as a resist film on the surface of a substrate is exposed to far ultraviolet radiation, and thereafter developed by means of acetic ester or cyclohexanone developing solution added with water and alcohol. Thus, the resist pattern can be easily made overhung in its profile by an order of submicrons, whereby high sensitivity and high resolution can be realized. Moreover, the resist pattern is not cracked after development, so that desirable heat resistance, solubility, and adhesive properties can be obtained in the resist pattern. |
| priorityDate | 1983-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.