| abstract |
PURPOSE:To increase the insulating resistance, reduce the dielectric constant, and increase the mechanical strength by a method wherein the titled substrate is made of a calcined mixture having a metal wiring layer and containing boro- silicate glass, alumina, and crystallized glass. CONSTITUTION:The mixed powder of boro-silicate glass, alumina, and crystalized glass is put in a bowl mill and changed into a slurry by 15-hr kneading under the addition of solvent, plasticizer, and resin binder. This slurry is molded into a green sheet by the doctor blade method and cut by punch into a required shape. Next, the wiring pattern is formed by screen-printing of Cu paste on the green sheet. This green sheet is laminated by heat-pressing and calcined. |