| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80787665b837ed3eb503bbcd27c0043a |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J27-18 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-18 |
| filingDate |
1984-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f3190471c260c04d1f15847bb1ffe78d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c58414e35796f108a0ebc7238b3b0503
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b01452015a2b7e5ef8ac0a43919c691
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_58afd8ac657f8f6a6c939fca0b2ca3d8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e12a7408458332b048e3a461278823f8 |
| publicationDate |
1985-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-S60243954-A |
| titleOfInvention |
Ion source |
| abstract |
PURPOSE:To enable oxygen ion implantation of at least 100mA to be stably performed by maintaining the distribution of an electric field near the lead-out electrode constant for a long time by preparing the lead-out electrode from a material containing an electrically conductive oxide. CONSTITUTION:A lead-out electrode 2 is formed by a tin material containing conductive tin oxide. The inner surface of a plasma chamber 8 is coated with a cylindrical quartz tube 7 so that metallic impurities are not produced by plasma striking the surface. Owing to the above structure, it is possible to stably lead out an oxygen beam. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S6418568-U |
| priorityDate |
1984-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |