http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S60198535-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fdad00677b9268c26e005a9e03a7b9dd |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-008 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-00 |
| filingDate | 1984-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_984e2e4286be7e679d8767d8d8b0022b |
| publicationDate | 1985-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S60198535-A |
| titleOfInvention | Photoresist composition |
| abstract | PURPOSE:To enhance resolution, storage stability, etc., by incorporating gamma-aminopropyltrihydroxysilane dehydration condensate in a photosensitive compsn. contg. a water-soluble polymer and a bisazide type photocross-linking agent. CONSTITUTION:The present photoresist compsn. having good resolution and superior adhesion is prepared by mixing about 1-30pts.wt. of a bisazide type photocross-linking agent, such as 4,4'-diazidostilbene-2,2'-disulfonic acid or its salt, with 100pts.wt. of a water-soluble polymer, such as polyacrylamide, polyvinylpyrrolidone, or gelatin, to prepare a photosensitive compsn., and incorporating gamma-aminopropyltrihydroxysilane dehydration condensate represented by the formula (n is an integer of 2-20) in this photosensitive compsn. in an amt. of 0.01- 20pts.wt. per 100pts.wt. of the water-soluble polymer. |
| priorityDate | 1984-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75935 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415758297 |
Total number of triples: 16.