http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S60124980-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_60e21de07fa18fc54e2150daffc14654 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1608 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L39-24 |
| filingDate | 1983-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4bb46b28d0930f6c5c8af577bb192353 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ab201fa1f60b8de8dcd1506ebd1b400 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5a6763be461a9be091c38691e4547186 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0fd6c1609eba808ab31b4d4240fa68fd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cc97da2e26ae105f1b811d50ea4cead0 |
| publicationDate | 1985-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S60124980-A |
| titleOfInvention | Manufacture of josephson element |
| abstract | PURPOSE:To easily obtain the titled element by a method wherein the first superconductor electrode is provided on a substrate by the treatment of reactive sputter etching using CBrF3 gas, and a tunnel barrier layer and the second superconductor electrode are successively formed on the electrode. CONSTITUTION:The first superconductor layer 3 made of Nb is formed on the substrate 2 with an Si oxide insulator 1 formed on the surface. A photo resist mask layer 4 having a required pattern is formed on the layer 3. Next, the layer 3 is treated by reactive sputter etching using CBrF3 gas with the mask layer 4 as a mask, and thus the first superconductor electrode 5 having the pattern corresponding to the pattern from the layer 3 to the layer 4 is formed. Besides, the tunnel barrier layer 6 and the second superconductor electrode 7 made of Pb or Pb alloy or Nb are successively formed on the electrode 5. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H02322-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H01156482-A |
| priorityDate | 1983-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6384 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419547108 |
Total number of triples: 20.