http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S60108349-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_60e21de07fa18fc54e2150daffc14654 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C23-00 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C15-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03B37-014 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C23-00 |
filingDate | 1983-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c5ad7f0c4964c0156c691819dfa6633b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ded3d80a351e60ba13e0f824a1afd5a4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa3fe467eabd5c70fa54af56211c9bf8 |
publicationDate | 1985-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-S60108349-A |
titleOfInvention | Surface treatment of fluoride glass |
abstract | PURPOSE: To remove completely water, OH group, etc. remaining of the surface of glass without losing smoothness, by subjecting the surface of optically ground fluoride glass to high-frequency sputtering in a specific gas atmosphere. n CONSTITUTION: The optically previously ground fluoride glass 4 is attached to the chuck 6 of the rod supporting member 5 fixed to the column 7 and rotated. One or more gases selected from CF 4 , C 2 F 6 , C 3 F 8 , C 4 F 10 , CCl 4 , Cl 2 , F 2 , PCl 3 CBrF 3 , BCl 3 , CHClF 2 , and CCl 2 F 2 is fed from the intake vent 2 of the chamber 1, high-frequency electrical power is sent from the high-frequency electric source 12 to the high-frequency electrodes 11, the surface of the glass 4 is subjected to high-frequency sputtering, the surface of the glass 4 is thinly ground to removed adsorbed water, OH group, etc. n COPYRIGHT: (C)1985,JPO&Japio |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S6428252-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2562219-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H03103338-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5201920-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5256178-A |
priorityDate | 1983-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.