| abstract |
PURPOSE:To obtain a photosolubilizable compsn. wide in development latitude and high in sensitivity by introducing a specified ester group as an acid-decomposable ester group. CONSTITUTION:A photosolubilizable compsn. consists of (A) a conpd. capable of producing an acid on irradiation of actinic rays, such as orthoquinonediazidosulfonyl chloride, (B) a compd. having at least one acid-decompozable ester group represented by formula I and increased in solubility by the action of the acid in a developing soln., and when needed, (C) an alkali-soluble resin, such as novolak type phenol resin, and the compd. (B) is preferably represented by general formula II or III in which R1 is a m-valent aliphatic or aromatic hydrocarbon group; R2, R3 are each alkyl or alkoxy; R5, R6 are each a divalent aliphatic or aromatic hydrocarbon; R7 is alkyl, aryl, or aralkyl; m is 1-1,000; n is 1-500; and a1, a2, b1, b2 are each 0 or 1. |