http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S60100449-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80787665b837ed3eb503bbcd27c0043a |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-956 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 1984-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_83a125d70da8279f58795f9e93c59fff http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a735b3c35f02e6dbab3a009985796a7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99a03c90ace1d96e0d86798f7fbb0e1f |
| publicationDate | 1985-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S60100449-A |
| titleOfInvention | Semiconductor measuring device |
| abstract | PURPOSE:To obtain a simple and inexpensive device for measuring the lifetime of minority carrier in a silicon wafer in noncontact by detecting the photovoltaic power produced upon emitting of a light by the variation in a potential by the capacitive coupling of a transparent electrode with the silicon wafer. CONSTITUTION:A light emitting diode 3 emits a light in the order of sequentially generating the light from the end of an optical fiber 4 opposed to a silicon wafer 1 in a direction parallel to the paper surface, thereby performing the primary scanning. The fiber 4 emits the wafer 1 as a spot light source to generate an electromotive force in an ultrafine region. The light is AC-modulated, and even if a transparent electrode 5 is separated from the wafer 1, the electromotive force is externally produced readily by the capacitive coupling. When the phase difference between the voltage of a power source 8 and a signal voltage is measured by a phase detector, the value of the lifetime of the minority carrier in the wafer can be measured in noncontact. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0697248-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108762316-A |
| priorityDate | 1984-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 |
Total number of triples: 19.