http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S59210558-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B15-60 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B15-60 |
| filingDate | 1983-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_779bce022aa770b7169fc837d8289181 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d07fc2f428487b68350405d8931af0c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b02079ff8bacf4a2f34ab6b75dca0e5 |
| publicationDate | 1984-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S59210558-A |
| titleOfInvention | Production of tape drive parts |
| abstract | PURPOSE:To produce a tape drive parts which can control the projected quantity of particles of a material having a surface of high hardness with high reproducibility, by monitoring the intensity of light emission spectrum of the aluminum atom contained in a gas plasma and completing the dry etching when the time integration quantity of the light emission spectrum intensity reaches a fixed level. CONSTITUTION:The inside of a vacuum container 12 is reduced the pressure down to 1X10<-5>Torr by a vacuum pump 13, and the gaseous mixture of carbon tetrachloride and helium is supplied into the container 12 through a pipe 17 in a flow rate of 30SCCM. At the same time, a vacuum degree control valve is controlled to maintain the vacuum degree at about 0.5Torr within the containr 12. Then the high frequency power is supplied to a sample plate 14 from a power supply 15 to produce a plasma 22 around a cylinder 11. The plasma light is led into a photoelectric transducer 19 through an interference filter 18 concurrently with generation of the plasma 22. the time integration quantity 23 of the light emission spectrum intensity of Al atom is measured and controlled by an integration device 21. Then the output of the power supply 15 is stopped when the prescribed quantity 23 is obtained. |
| priorityDate | 1983-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.