| abstract |
PURPOSE:To separate hydrogen by allowing the same to permeate a separation membrane, by forming partial pressure difference in both sides of the separation membrane by sending a gaseous mixture containing hydrogen and helium to the single side of the separation membrane comprising a transient metal or an alloy thereof on a gas pervious support. CONSTITUTION:A continuous membrane having a thickness of about 1mum or less comprising a transient metal such as Fe, Cr, Mn, Ni, Ag, Pd or Ti or an alloy thereof is formed on a gas pervious support such as a ceramic porous membrane by sputtering. This continuous membrane is used as a separation membrane and a gaseous mixture containing hydrogen, an isotope thereof and helium is sent to the single side of said membrane while the supply side of the membrane is pressurized to form partial pressure difference in both sides of the membrane and hydrogen and the isotope thereof are permeated to the opposite side of the membrane more fastly as compared with helium to separate the same. As the above mentioned continuous membrane, a SUS membrane comprising an Fe-Cr-Ni type alloy is suitably used from a standpoint of cost and capacity. |