| abstract |
PURPOSE:To obtain a stable magneto-optical storage element which causes no change in the lapse of time by providing a rare earth transition thin metallic alloy film, a transparent dielectric film of an AlN film, etc. containing no oxygen, and a reflecting film consisting of Ti or TiN on a substrate in order of the foregoing, and preventing an oxidation of the thin alloy film being a recording layer. CONSTITUTION:As for a magneto-optical element for executing the recording, reproducing, erasion, etc. of an information by a laser light, etc., an thin amorphous rare earth transition metallic alloy film 12 such as Gd, TB, Fe, etc. is formed as a recording layer on a glass substrate 11. Subsequently, a transparent AlN film 13 containing no oxygen is formed by reaction spattering in an N2 atmosphere by using Al as a target, and oxidation of the film 12 is prevented by preventing an invasion of O2 or H2O from the outside. Next, a reflecting film 14 of Ti or TiN is formed on the film 13 by spattering. As for the film 14, a reflection factor in a laser wavelength area is higher than that of the film 13. In this way, oxidation of the element is prevented remarkably, a quality of a reproducing signal is improved, and a long life element is obtained. |