http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S59143251-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d7576285d411d00c697e07270d2814a |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J49-142 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-252 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J49-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-225 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J49-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J49-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-62 |
| filingDate | 1983-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cc295061405b5cfabebd32a1218da504 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6524cc111ce7023af7dbaf132a98cb44 |
| publicationDate | 1984-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S59143251-A |
| titleOfInvention | High sensitive mass analyzer |
| abstract | PURPOSE:To isolate atoms and molecules migrating along the surface, keep clean the surface of a sample and analyze carbon and oxygen included in the sample with high sensitivity by irradiating the ion beam radiating part with a laser beam. CONSTITUTION:In the figure, 3 is a laser beam used for irradiating the sputter surface of a sample 4. Atoms and molecules migrating along the surface of sample 4 are usually physically attracted weakly by the van der Waals forces. It is said that the activated energy moving on the surface of sample 4 is 0.1- 1kcal/mol. Meanwhile, since the light of 1eV corresponds to 11.600k in terms of thermal energy, it gives energy which is sufficient for atoms and molecules to be isolated from the surface of sample 4. Accordingly, when the area to be sputtered by ion is irradiated by laser beam before and during the sputtering, oxygen and carbon etc. are isolated from the surface and moreover inflow of new atoms and molecules can also be prevented. |
| priorityDate | 1983-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.