| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-32 |
| filingDate |
1981-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1357d32f16c89252faeee1eb1d4fda3b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_779c5477263d43cc50b7f29f171bb1d5 |
| publicationDate |
1983-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-S5848048-A |
| titleOfInvention |
Resist material for deep ultraviolet exposure |
| abstract |
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S5868743-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8460855-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7794919-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0942331-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0942331-A1 |
| priorityDate |
1981-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |