http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S58219549-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0125 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-325 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-012 |
| filingDate | 1982-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fbb3e46230391982f2fea7b459be7d08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_df1f262c0f8b6674af114f611cadf62f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8fffc9ab1d382ccfd1a59ccc5eb62349 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dbdeb35ed9bb63e0b282d7997935ef68 |
| publicationDate | 1983-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S58219549-A |
| titleOfInvention | Developing method of photoresist |
| abstract | PURPOSE: To carry out development without causing swelling development by forming a latent image in a photoresist contg. poly(methyl isopropenyl ketone) and an azido comound and by developing the film with a specified developer. n CONSTITUTION: A photoresist soln. contg. poly(methyl isopropenyl ketone) and an azido compound represented by the formula (where X is H or Cl, and A is O, S, CH 2 , SO 2 or S 2 ) is applied to a substrate and prebaked to remove the contained solvent. The resulting photoresist film is exposed through a mask to form a latent image, and the film is developed with ≥1 kind of developer selected from ketone type org. solvents such as methyl ethyl ketone, nitroparaffin type org. solvents such as nitromethane, and polyhydric alcohol type org. solvents such as ethylene glycol monomethyl ether. n COPYRIGHT: (C)1983,JPO&Japio |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8900802-B2 |
| priorityDate | 1982-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.