http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S5767165-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0021 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01C7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-12 |
| filingDate | 1980-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ef87386ba1f57b3a7b1d7d0360443a5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_59928d64dba0b5e617afde7e6ddee468 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_39a90f84c36ed88769d1377aa1c50933 |
| publicationDate | 1982-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S5767165-A |
| titleOfInvention | Method and device for production of ultrafine particle film |
| abstract | PURPOSE:To improve the reproducibility and uniformity of ultrafine particle films and perform production effectively and efficiently by winding a high frequency coil exciting a gaseous atmosphere which moves an evaporating material on a cylindrical body. CONSTITUTION:In the case of producing a film of, for example, a silver oxide, with a producing device for ultrafine particle films of oxides, nitrides, carbides, etc., the inside of a vacuum vessel consisting of a bottom face plate 1 and a bell-jar 2 is evacuated through a valve 10, thence the valve 10 is closed. Next, gaseous O2 is maintained at constant pressure via a lead-in valve 8. Electric power is applied from an electric power source 20 to a high frequency coil 17 wound on a cylindrical body 16, by which the O2 in the cylinder 16 is excited and activated. On stabilizing of oxygen plasma, electricity is conducted to a boat 5 to allow the boat to evolve heat by holding a through-hole 14 closed with a shutter 13, by which thin is evaporated. When the evaporation stabilizes, the hole 14 is opened, and tin vapor is put into the oxygen plasma atmosphere of the cylinder 16 to form an ultrafine particle film of a tin oxide on a substrate 12. Thereby, the tin vapor is introduced uniformly into said atmosphere. |
| priorityDate | 1980-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.