| abstract |
PURPOSE: The titled resin composition, containing a polymer of a monomer containing an episulfide ring, etc. essentially and a specific diazonium salt, having improved film forming ability, solubility and sensitivity to insolubilization by light, and useful as a photoresist. n CONSTITUTION: A photocrosslinkable resin composition preparred by dissolving a polymer of a monomer expressed by formulaIor II (R is H, alkyl, chlorine or mono-chloroethyl), e.g. 2,3-epithiopropyl acrylate, or a copolymer of the monomer with another copolymerizable monomer, e.g. styrene, preferaby containing ≤50mol% vinyl monomer, in a solvent, e.g. benzene, and then dissolving 0.1W5mol%,preferably 0.5W3mol%, based on the polymer, compound expressed by formula III (R is H or alkyl), e.g. N,N-dimethylaminobenzene diazonium tetrafluoroborate, uniformly in the resultant solution. n COPYRIGHT: (C)1982,JPO&Japio |