abstract |
PURPOSE: The titled composition, containing a specific polyamic acid, an aromatic bisazide compound and an amine compound containing an unsaturated group, having a high sensitivity and good degree of resolution, and capable of being a heat-resistant polyimide high polymer by the heat treatment after the formation of an image. n CONSTITUTION: A composition consisting of (A) 100pts.wt. polyamic acid containing repeating units of formulaI(R 1 is trifunctional or tetrafunctional organic group; R 2 is bifunctional organic group; n is 1 or 2) essentially, (B) 0.1W 100pts.wt. aromatic bisazide compound of formula II[W is -OH, -OR 3 , -R 4 -OH, -SiR 3 3 , -COOH, -COOR 3 , -NR 2 3 or -NH 2 (R 3 is lower alkyl; R 4 is alkylene); m is 0 or 1]and (C) 1W400pts.wt. amine compound of formula III (R 5 , R 6 , R 7 and R 9 are H, lower alkyl, phenyl or vinyl; R 8 is alkylene) and if necessary (D) a photosensitizer, e.g. anthrone. n COPYRIGHT: (C)1982,JPO&Japio |