http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S57167674-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f4ff9ddf728a7e1a0b36c9cc38b89ad6 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-72 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-322 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-72 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-73 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-331 |
| filingDate | 1981-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_24e3d6ed052fb1f82411fdb610a2bd43 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7fe36ed5fb228d1191e28cc771de7698 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c3bd839edf31f0c042cae13878728da0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c9f97ea7bb63c317cb4cdac4fc5d020d |
| publicationDate | 1982-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S57167674-A |
| titleOfInvention | Manufacture of semiconductor device |
| abstract | PURPOSE:To easily control the lifetime of the subject semiconductor device by a method wherein a lifetime killer is formed at the prescribed position on a semiconductor substrate by irradiating an electron beam from above the mask consisting of Pb metal. CONSTITUTION:The Pb metal 4 is coated on the insulating film 3 on the semiconductor substrate 2 by performing evaporation or sputtering. Then, the metal 4 on a base 1, i.e., the prescribed position, is removed by performing a wet-etching, represented by aqua regia and the like, or a dry-etching wherein the gas of carbon tetrachloride and the like is used. Then, an electron beam is irradiated from above the mask, consisting of Pd metal 4, using a Van dd Graff type electrostatic accelerator, and a lifetime killer is formed on the base 1. |
| priorityDate | 1981-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.