http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S571224-A

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filingDate 1980-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c16b0dddacdb79c23da7c436676383cb
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publicationDate 1982-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-S571224-A
titleOfInvention Monolithic semiconductor device
abstract PURPOSE:To have a silicon device and a compound semiconductor device formed in one body by a method wherein a unipolar semiconductor and a compound semiconductor are provided on the same substrate and a part of the crystalline semiconductor film of either of the semiconductor is formed on the cyclic irregular surface, to be used for graph-epitaxial, consisting of an insulating material. CONSTITUTION:The cyclic irregular face 2, to be used for grapho-epitaxial, is formed on the semi-insulating GaAs substrate 1 by performing a selective etching and a part of which is formed into an insulated film 8 by performing an anodic oxidation. Then, on a part of the surface, an undoped GaAl layer 4, a P type GaAlAs layer 5, a P type GaAs layer 6 are grown by laminating, an upper electrode 7 to be used as a laser section is coated on the end section of the above layers and on the other end of the surface which is contacting the electrode 7, an Si layer 9 is grown, covered by a thick SiO2 film 10, its center part is formed with a thin SiO2 film 10', an electrode 11 is covered on the film 10' and this section is used as an FET. Through these procedures, a laser oscillation control is performed by the FET and the device can be formed in one body.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S58140113-A
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Total number of triples: 29.