http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S5689837-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5548401681e98572bc043faa4911b047 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J20-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J20-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-46 |
| filingDate | 1979-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7643c1850670324461a0c65b05283d51 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8b77ce82820b1f58a628d2d9cf8e697a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fdd5664378ef0f22f27b8f28a6df9924 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4a872db352c0a406395c4cf43934528c |
| publicationDate | 1981-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S5689837-A |
| titleOfInvention | Cleaner composition of exhaust gas |
| abstract | PURPOSE: A cleaner composition for PH 3 , AsH 3 , H 2 S, etc. in exhaust gases which is obtained by penetrating an aqueous soln. preped. by adding specific auxiliary material to an aqueous soln. of nitrates or metal chloride into a porous material. n CONSTITUTION: A solvent prepd. by dissolving a base material consisting of nitrates such as AgNO 3 with water is penetrated into a platelike or granular porous material such as pearlite or alumina gel. Or one or several kinds of Fe(OH) 3 , CuCl 2 , CuO, MgCl 2 , HgCl 2 are added as an auxiliary material to a base material consisting of metal chloride such as FeCl 3 and the solution prepd. by dissolving these in water is penetrated into the above-mentioned porous material. This is used as a cleaner composition of exhaust gases of doping gases used in the production processes for transistors and integrated circuits in semiconductor electronic industry, whereby the harmful components such as PH 3 , AsH 3 and H 2 S contained in these gases are oxidized, absorbed and captured. n COPYRIGHT: (C)1981,JPO&Japio |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4532115-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S61129026-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0457368-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4578256-A |
| priorityDate | 1979-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 41.