http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S5669538-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5db580deca7130dbe51805c6c608b35 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-91 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-91 |
| filingDate | 1979-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_83bea26ecc090c802ae474eba0c15501 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42b29bc106dd1ada868608236dcc009d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c38487fbfea1d05e74fff976936cbbfa |
| publicationDate | 1981-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S5669538-A |
| titleOfInvention | Detecting method of pin hole |
| abstract | PURPOSE:To shorten the detecting time by using an oxidizer and a heat-resistant and pressure resistant container. CONSTITUTION:An oxidizing agent 11 such as water, oxygen and a heat-resistant and pressure resistant container 12 such as quartz capsule are prepared. A semiconductor substrate 10 on which a thin film of insulating material of SiO2 or the like is covered, is placed in the container 12 together with water as the oxidizing agent 11, the inside of the container 12 is made in vacuum condition by a vacuum pump 13 and sealed and then the container is heated by a furnace 14. Thus, the water of the oxidizing agent 11 is changed into steam and by this pressure the inside of container 12 reaches high pressure. If there are pin holes in the thin film of the insulating material, the steam of the oxidizer easily enters the pin holes for a short time to form spots of oxide on the semiconductor substrate 10 just below the pin holes. Accordingly, if the presence of the spots of the oxide on the surface of the semiconductor substrate 10 is examined by using a microscope etc., the presence of the pin holes can be detected. |
| priorityDate | 1979-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.