http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S5624342-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_385752f237551ca1b257f160a0f2434b |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-031 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-031 |
| filingDate | 1979-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0962fdcd82dd5fc0f40bb2b4df68f176 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_377a5d50d600aab0a79feff3791a4997 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e9efd414682a0d0d73c5c1a84e9390c1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b1fac764c437de7564299087f1f5198 |
| publicationDate | 1981-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S5624342-A |
| titleOfInvention | Image forming method |
| abstract | PURPOSE:To enhance the resolution in the formation of a resist image on a substrate having a surface of high reflectance by adding a specified p, p'-diaminobenzophene deriv. to the cyclization product of a diene type polymer, a photocrosslinking agent and a shelf stabilizer. CONSTITUTION:A compound such as p, p'-tetramethyldiaminobenzophene represented by the formula (where each of R1-R4 is H, CH3 or C2H5 and X is O or S) is added to a photoresist soln. contg. the cyclization product of a diene type polymer such as polyisoprene or polybutadiene, a diazide compound as a photocrosslinking agent and a hydroxy aromatic compound or the like as a shelf stabilizer in 0.1- 10wt% amount to the amount of the cyclization product. This photoresist soln. is applied to a substrate such as a silicon wafer having a layer of Al or the like having surface of high reflectance. Using the resulting photoresist a fine image is obtd. since the dye added prevents light from reaching a portion not to be exposed owing to halation in exposure, lowering the resolution. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5011755-A |
| priorityDate | 1979-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 |
Total number of triples: 19.