http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S5588371-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4edd4e526605dbd18b513b4b30d19ab2 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-283 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-47 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-872 |
| filingDate | 1978-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6fb73cd5bba3c24a5528d72c28edf60 |
| publicationDate | 1980-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S5588371-A |
| titleOfInvention | Preparation of schottky barrier diode using gallium arsenide |
| abstract | PURPOSE: To stabilize the state of a boundary face between a substrate and a protecting film and prevent the drop of reverse withstanding voltage by growing a surface protecting film whose main component is arsenic or gallium on a gallium arsenide substrate on which electrodes are formed. n CONSTITUTION: After forming an epitaxial layer 11 on a gallium arsenide substrate 10, etching grooves 12 are cut to form a mesa part 13, and further, in the etching grooves 12 and on the top of the mesa part, ohmic electrodes 15 and a Schottky electrode 14 are formed respectively, Next, a surface protecting film 16 whose main component is arsenic oxides is formed on the substrate 10 by the methods of plasma oxidation, thermal oxidation in hydrogen peroxide solution, etc. The surface protecting film 16 may be that whose main component is gallium oxides formed by anodic oxidation method. Then coating polyimide resin 17 and forming contact electrodes 18, the substrate 10 is formed into a prescribed form by etching. n COPYRIGHT: (C)1980,JPO&Japio |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0538682-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5317190-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H07146910-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103245612-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0538682-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H06176211-A |
| priorityDate | 1978-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.