http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S5456763-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_44f82521bd7b49adba4be2e3e4f3b66a http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3fb751fc1583ed35203425a4bd16589f |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R27-00 |
| filingDate | 1977-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6212d92a144ddc11b6f3b7916055915c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f87c1eabb02132b58c627a7b7bd0cbac http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c9cffb5ff760771689e4e7532e03a37 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be163b1f8073d1df889cf6b72c578810 |
| publicationDate | 1979-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S5456763-A |
| titleOfInvention | Resistivity measuring method for semiconductor silicon single-crystal |
| abstract | PURPOSE: To secure the steady measurement of the resistivity by processing the surface of the Si single-crystal in the oxidizable water solution or the oxidizable atmosphere in a short time less than one hour. n CONSTITUTION: About 1-hour process is given in the water solution of the demineralized water, nitric acid, sulfuric acid plus water, sodiumdichromate, H 2 O 2 , etc. to the Si single-crystal, epitaxial layer and the like which are polished or etched in a chemical or mechanical way. The normal temperature is given to the sodium dichromate water solution, and the boiling treatment is given to other cases. Also, the vapor or ozone produced through boiling of the water solution of nitric acid, H 2 O 2 , etc. can be used, In this way, the resistivity change is extremely stabilized, and no change is recognized for the sheet resistance even if the single-crystal and others may be left in a room about the days n COPYRIGHT: (C)1979,JPO&Japio |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101806837-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0889514-A1 |
| priorityDate | 1977-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.