| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7ef01e33058cf740cf2197991be97af1 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J23-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-86
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J23-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J23-755 |
| filingDate |
1997-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bfb6f18c52ebf899f28c98bee8bc62fc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f25a4f80086c9cbce1f2f6f197855fb |
| publicationDate |
1999-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H1190179-A |
| titleOfInvention |
Method and apparatus for removing nitrogen trifluoride |
| abstract |
(57) [Summary] A method for safely and efficiently treating NF 3 for a long time. SOLUTION: After an exhaust gas containing nitrogen trifluoride and a reducing gas are passed downflow through a catalyst layer heated to 150 to 800 ° C, water is supplied to a position below the catalyst layer kept at 120 ° C or higher. I do. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6921519-B2 |
| priorityDate |
1997-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |