| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b822ee046eb6c45d1e3bd9ce9c1782e |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 |
| filingDate |
1997-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e52c0679dd5c60031b4030509e2a4536
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d80a98ecf61309dbcba1d7482582956e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d1d89c208fb2fe90cf9e5d70bf49684
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01586b738d5c3da823a8b306e0b71efa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_21747acfb77b0d181ab4dff0d66658d4 |
| publicationDate |
1999-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H118196-A |
| titleOfInvention |
Semiconductor thin film and semiconductor device |
| abstract |
(57) [Summary] [Object] To provide a semiconductor thin film having extremely excellent crystallinity and a high-performance semiconductor device using the same. After crystallizing an amorphous semiconductor thin film using a catalyst element, a heat treatment is performed in an atmosphere containing a halogen element to remove the catalyst element. The crystalline semiconductor thin film thus obtained has a feature that it exhibits a substantially {111} orientation, and most crystal lattices have continuity at crystal grain boundaries. The crystal grain boundaries greatly contribute to the improvement of carrier mobility, and realize a very high-performance semiconductor device. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8446010-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009130822-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6558988-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6274888-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7297982-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007013119-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6965122-B2 |
| priorityDate |
1997-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |