http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H1180960-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c1755eede76ea7e719a3e0d2843cd793 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-515 |
| filingDate | 1997-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3283e80f267944e980991959fac76fe8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e7e1a3aac6e1d9f1d83e092b6d0955f |
| publicationDate | 1999-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H1180960-A |
| titleOfInvention | Release Sheet Manufacturing Method |
| abstract | (57) [Problem] To provide a release sheet having excellent release capability by stably generating discharge plasma under a pressure of about atmospheric pressure and leaving no unreacted compound on the release sheet. A method for efficiently manufacturing is provided. SOLUTION: Under a pressure near the atmospheric pressure of a gas atmosphere containing a gaseous fluorine compound, a solid dielectric is placed on at least one of the opposed surfaces of the opposed electrode, and a sheet material is inserted between the opposed electrodes and pulsed. The discharge plasma generated by applying the applied electric field is brought into contact with at least one surface of the sheet material to form a fluorine-based thin film on the sheet material. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03071839-A1 |
| priorityDate | 1997-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 43.