http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H1178011-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_216a7faed04ec9497c9819cc03c04599 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-055 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-135 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-39 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-43 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-253 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-145 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-23 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-339 |
| filingDate | 1997-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92ab5f0f2aa5173af51f755ae1571bff |
| publicationDate | 1999-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H1178011-A |
| titleOfInvention | Vibrating plate integrated piezoelectric body and method of manufacturing the same |
| abstract | (57) [Summary] [PROBLEMS] To reduce the manufacturing cost of a piezoelectric body and a vibrating body without lowering the piezoelectric performance. SOLUTION: By using a vibration plate made of the same member as a piezoelectric body, cracks do not occur in the piezoelectric film even when both are laminated, and residual stress can be reduced. Further, the adhesion strength between the vibration plate and the piezoelectric body is large because they are the same member, and peeling does not occur at the time of large displacement. In addition, since the electrode film can be formed after firing the PZT ceramic, an inexpensive material can be selected. Further, since the crystallization of the diaphragm and the PZT ceramic can be performed in one firing step, the steps can be simplified. As described above, since the vibration plate and the piezoelectric body are the same member, it is possible to manufacture a piezoelectric body having excellent piezoelectric characteristics at low cost. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7935264-B2 |
| priorityDate | 1997-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.