http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H1165111-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dca153f19868f747eeea612b047a9e7c http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_25afcb7bf2c0d839bb9118680e60e1ae |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-033 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-30 |
| filingDate | 1997-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dea7fa82973645ae09b7289d47c92d43 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0dd4a134f9fba3b7b9ffb5e49006385a |
| publicationDate | 1999-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H1165111-A |
| titleOfInvention | Method of forming resist film and method of manufacturing microstructure |
| abstract | PROBLEM TO BE SOLVED: To provide a thick PMM having a uniform thickness and a uniform composition. A method for forming a PMMA film suitable for obtaining an A film is provided. A supporting substrate having a main surface is prepared. PMMA is dissolved in liquid MMA, and a polymerization initiator is added to obtain a resist raw material liquid. A resist raw material liquid is applied on the main surface of the support substrate. A PMMA film is placed on the main surface of the supporting substrate so as to sandwich the applied resist raw material liquid. MMA in the resist raw material solution is polymerized while pressing the PMMA film against the support substrate, and the PMMA film is bonded to the support substrate. |
| priorityDate | 1997-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.