http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H1165086-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_88fbcd2a70a3c49d0aed69a000d55909 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-70 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
filingDate | 1997-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_136070129579ded38aadad920729e7d7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42c6164867b3bdc8768e2762b793c831 |
publicationDate | 1999-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-H1165086-A |
titleOfInvention | Pattern formation method |
abstract | PROBLEM TO BE SOLVED: To provide a method for forming a pattern in which an inorganic pattern such as a phosphor is not biased even by shrinkage during firing and an intended ideal pattern is obtained, in particular, multicolor fluorescent light of a plasma display panel (PDP). It is an object to provide a method for forming a surface. SOLUTION: When exposing an inorganic-containing photosensitive resin composition (R) containing an inorganic substance such as a phosphor, a non-shielding portion (M 0 ) Used as having a shield portion (M 1) unshielded portion as a pattern mask (M) consisting of the (M 0) fine shielding portion below the resolution limit in the (M 1 ') and the patterned mask (M ) To expose the inorganic-containing photosensitive resin composition (R) to form a semi-cured portion (R 1 ′) in the cured portion (R 1 ) of the composition (R) due to exposure. After exposure, development is performed, and finally baking is performed. |
priorityDate | 1997-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 77.