| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_294881271413951a95f284b588a68e66 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-473
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2001 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-473
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3277 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24 |
| filingDate |
1997-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0b7866b70696d943bffd4d8729c5af57 |
| publicationDate |
1999-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H116071-A |
| titleOfInvention |
Plasma CVD method and plasma CVD apparatus |
| abstract |
(57) [Summary] [PROBLEMS] To form a film by a plasma CVD method, sufficiently cool a support to suppress thermal deformation, An abnormal discharge is prevented, and a CVD film is formed without hindering the film formation. SOLUTION: After forming a metal thin film on a long non-magnetic support, the thin film is formed on the metal thin film by a plasma CVD method while continuously running the non-magnetic support along a cooling can. In doing so, as the cooling can, An insulating layer 15 made of ceramic is formed on the entire outer peripheral surface of the metal can 12 to a thickness of 0.3 to 1.0 mm. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017053000-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015151722-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015200011-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015196879-A |
| priorityDate |
1997-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |