http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H1157597-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6c8d4dc7bd1a30d8fda907fceaeb4e69 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C11-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 1997-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af505d7d17ce8b8b79fb24403794e97e |
| publicationDate | 1999-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H1157597-A |
| titleOfInvention | Coating method and color filter manufacturing method |
| abstract | (57) Abstract: An outer cup (1), an inner cup (3) arranged inside the inner cup and supported by a rotating shaft (2), and an object (A) arranged at the center thereof. Coating mainly comprising a fixing mechanism (4), an inner cup lid (5) arranged at an upper open portion of the inner cup (1), and a means for supplying a coating liquid to a central portion of the surface of the object (A). In a coating method using an apparatus, there is provided a coating method in which a mist of a coating liquid is prevented from being mixed into a coating surface, and an increase in a film thickness at a corner portion or a peripheral portion of an object to be processed (A) is more effectively prevented. I do. In the above-mentioned coating method, at least before finishing opening of an inner cup (3), an object to be processed (A) placed on the inner cup lid (5) and the fixing mechanism (4). The solvent-containing gas is introduced from the solvent-containing gas generation source (39) into the space (B) between the two. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005103392-A |
| priorityDate | 1997-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 58.