| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7ef01e33058cf740cf2197991be97af1 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-86
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-34 |
| filingDate |
1997-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f25a4f80086c9cbce1f2f6f197855fb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bfb6f18c52ebf899f28c98bee8bc62fc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f40516c138a6f9fc52f4e07b6ec72bbd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29aafeb2c7fb5894024fed3c883276e6 |
| publicationDate |
1999-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H1157409-A |
| titleOfInvention |
Method and apparatus for removing nitrogen trifluoride |
| abstract |
(57) [Summary] To remove NF 3 safely and efficiently. SOLUTION: An exhaust gas containing nitrogen trifluoride is reacted with a reducing gas in the presence of a catalyst, and a specific device is provided downstream of a reactor filled with the catalyst to remove nitrogen trifluoride. |
| priorityDate |
1997-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |