http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H1152568-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-033 |
| filingDate | 1997-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_955eefd3ff569a382f9208a334d47db0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb2cdfdb7a2bcaed73932a50e34f222e |
| publicationDate | 1999-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H1152568-A |
| titleOfInvention | Radiation-sensitive resin composition |
| abstract | [Problem] Negative resist type radiation-sensitive resin excellent in sensitivity, developability, residual film ratio, heat resistance, chemical resistance, adhesion to substrate, and transparency in visible light region Providing a composition. [A] (a-1) a polymerized unit of an unsaturated carboxylic acid, (a-2) a compound represented by the following formula [I]: (Wherein, R 1 to R 3 are each independently a hydrogen atom or an alkyl group having 1 to 5 carbon atoms, R 4 is an alkyl group having 1 to 5 carbon atoms, and m and n are each independently And (a-3) another radically polymerizable compound copolymerizable with the unsaturated carboxylic acid and the compound of the formula [I], if necessary. (Hereinafter, also referred to as “copolymer [A]”), [B] a polymerizable compound having an ethylenically unsaturated double bond, and [C] a photopolymerization initiator. Radiation-sensitive resin composition. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006091490-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4529616-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101177128-B1 |
| priorityDate | 1997-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 273.