| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ff756640db58642e5aa7a021df7f6bed
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0dc99d4a010b312feff041a3ebacdae1 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-34 |
| filingDate |
1997-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_234a1cba4dd31d9c6b55483517233abf |
| publicationDate |
1999-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H115012-A |
| titleOfInvention |
Exhaust gas treatment method and treatment device |
| abstract |
(57) [Problem] To provide an exhaust gas treatment technology for treating exhaust gas discharged from a semiconductor manufacturing process or the like and decomposing and removing harmful and polluting substances contained therein. SOLUTION: In a vacuum atmosphere A between plasma electrodes 20 and 21, plasma is generated while mixing a reaction promoting gas with an exhaust gas discharged from a semiconductor manufacturing process or the like, so that constituents in the exhaust gas accelerate the reaction. It is excited and activated with the gas to react, and is deposited and solidified on the electrode surfaces of the plasma electrodes 20 and 21 as a plasma reaction product, Thereby, harmful and polluting substances in the exhaust gas are decomposed and removed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2413293-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017510453-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013086095-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10920315-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160130261-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-4307091-B4 |
| priorityDate |
1997-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |