| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d7576285d411d00c697e07270d2814a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07342 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06738
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R3-00 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-067 |
| filingDate |
1997-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2919b18599416b1b6de57bc96b33f340 |
| publicationDate |
1999-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H1138041-A |
| titleOfInvention |
Cantilever type probe needle for probe card, its manufacturing method and control method |
| abstract |
PROBLEM TO BE SOLVED: To provide a probe needle for a probe card, a method for manufacturing the same, and a method for controlling the same, which can prevent a decrease in the reliability of a semiconductor device due to an inspection process. SOLUTION: In a cantilever type probe needle for a probe card, a tip part 1 of the probe needle is connected to a first convex part 3a. And a second convex portion 3b formed with the first convex portion 3a and the groove portion 4 therebetween. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012067161-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012112680-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015537213-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20130102081-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012067162-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012112681-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009503535-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9625492-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014145772-A |
| priorityDate |
1997-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |