http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11350181-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1374dd16777534b65ad4422333245af8 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C33-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D1-00 |
| filingDate | 1998-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_445ba0a411a2aa1bb31f0a7e6ebb1bef http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b55308d748a15cb45f4eab4c02a782c7 |
| publicationDate | 1999-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H11350181-A |
| titleOfInvention | Manufacturing method of stamper |
| abstract | PROBLEM TO BE SOLVED: To provide a stamper manufacturing method capable of accurately forming a convex portion of a stamper for forming a concave portion such as a finer groove or pit of a substrate to be formed. SOLUTION: In a method of manufacturing a stamper having a convex portion of a predetermined pattern formed on one surface used for molding a resin, After coating the organic thin film to the predetermined thickness on the master with a flat surface, A photoresist layer is coated on the organic thin film, exposed by a laser beam according to the pattern shape of the projections forming the photoresist layer, the exposed photoresist layer is developed to remove the exposed portions, and the photoresist layer is exposed. The portion of the organic thin film exposed by the removal of the portion was removed by etching, the remaining portion of the photoresist layer was further removed, and then a conductive film was deposited on the entire exposed portion of the substrate and the remaining portion of the organic thin film. Thereafter, a metal film is deposited to a predetermined thickness by using an electroplating method, and the metal film is separated from the master to form a stamper. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1291859-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1291859-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/NL-1012035-C2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7799254-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8833216-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0240250-A1 |
| priorityDate | 1998-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID977 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523291 |
Total number of triples: 21.