http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11349653-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0cdb395105a75f1b0346cc31b81fade1 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G8-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G8-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-032 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023 |
| filingDate | 1998-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f321451a93bb4fbe28ce195de1f63012 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_acfcfb9d0f386cae79ee649a83179844 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd30766aa9838fafc4117693bbe66072 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a486fbf2a2b929598ac2d37013b3bd24 |
| publicationDate | 1999-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H11349653-A |
| titleOfInvention | Phenolic resin for photoresist |
| abstract | (57) [Problem] To provide a phenolic resin for photoresist which has higher heat resistance, higher resolution and higher sensitivity than conventional phenolic resin for photoresist. SOLUTION: The composition of phenols (P) is 55-98% by weight of meta-cresol, 1-20% by weight of para-cresol, xylenol and / or trimethylphenol 1-. 25% by weight, the composition of the aldehyde (A) is an aldehyde containing formaldehyde and an alkenyl group, the weight ratio of which is 1 / 9-9 / 1, and the phenol and the aldehyde are acid catalyzed. Wherein the amount of acid catalyst remaining in the phenol resin is so small that it does not affect practical use, and metal impurities are 1 ppm or less in all elements. resin. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2016035555-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113461885-A |
| priorityDate | 1998-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 107.