| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_205ef3efc4027b8a493914cc4c917f0a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14643 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B3-0012
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B3-0056
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B3-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-02327 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-146 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-0232
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-11 |
| filingDate |
1998-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b40fe40b4d8508a930fd3366c3461e6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6919ba383fed5dbebf9e9eabc009c903
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36e7f7c882e724e72e9b7f14dff8cb51
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8610709741552f18edeebad6fe2ecd98 |
| publicationDate |
1999-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H11298046-A |
| titleOfInvention |
Manufacturing method of micro optical semiconductor lens |
| abstract |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a group III-V semiconductor micro optical lens hybridly integrated in a micro optical device. A micro-optical lens is formed from a semiconductor wafer by selectively etching a surface of the semiconductor wafer, and a lens arm selectively etches the surface of the semiconductor wafer on a surface opposite the surface. It is formed from a semiconductor wafer. The lens and lens arm are then separated from the substrate wafer and attached directly to the micro-optical device. Forming a micro-optical lens hybridly integrated into a micro-optical device from the same III-V semiconductor material as the device results in increased thermal expansion stability and efficient light transfer between the micro-optical lens and the micro-optical device Is achieved. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4725502-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4640326-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007094430-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007108776-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007108777-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007086805-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4586797-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008134343-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100969988-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007094429-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8591716-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007094431-A |
| priorityDate |
1998-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |