Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03d0f52bb4069f8a19d70dcfb697c67a |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
filingDate |
1997-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e8c6788d846774f20e5ac920e2e11e3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_61eb1b5009be47cb05392bb6e31476c3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_601ba4a71019c4ad5d4dff3748ba6624 |
publicationDate |
1999-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-H112901-A |
titleOfInvention |
Positive photosensitive composition |
abstract |
(57) [Problem] To provide a resist pattern having a high photodegradation efficiency, a high sensitivity, and an excellent resist pattern. An object of the present invention is to provide a positive photosensitive composition which does not exhibit a T-type (T-top) shape on the surface of a resist pattern and has excellent storage stability. SOLUTION: (a) a compound having a specific structure which generates sulfonic acid upon irradiation with actinic rays or radiation, and (b) a group which is decomposed by the action of an acid to increase solubility in an alkali developing solution. A positive photosensitive composition comprising: a resin containing a repeating unit having a specific structure. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4557115-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7374857-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6342334-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6406831-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001324812-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015146053-A1 |
priorityDate |
1996-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |