http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11288102-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8fb9f44db08d1c42a53f3d28eaae416f |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 |
| filingDate | 1998-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0005f1dface87554843184b5d2c9d508 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d34f574db9a44ace024aeb6da3772a5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c0965d10ad06cd7e32c474d43e0c7b3f |
| publicationDate | 1999-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H11288102-A |
| titleOfInvention | Developer for resist |
| abstract | (57) [Problem] To provide a resist developing solution which is excellent in dissolution selectivity to promote solubility of a dissolving part and suppress dissolution of a non-dissolving part in a fine resist pattern, and can be developed in a short time. To provide a developing method using the same. Ammonia, a primary amine, a secondary amine, a tertiary amine, an imine, an alkanolamine, an amide, a heterocyclic compound optionally having an alkyl group having 1 to 8 carbon atoms, and a compound represented by the formula (I): Embedded image At least one selected from quaternary ammonium hydroxides represented by [R 1 , R 2 , R 3 and R 4 are a methyl group, an ethyl group, a hydroxymethyl group, a hydroxyethyl group, a methoxymethyl group or a vinyl group] A basic compound, and p 1 selected from hydrogen acids and salts thereof and oxo acids and salts thereof, wherein the first dissociation constant of Ka is -12.0 to 9.0 at 25 ° C. A resist developer containing at least one kind of acid compound, and a developing method using the same. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005022267-A1 |
| priorityDate | 1998-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 222.